| Flow Range (Full Scale Capacity) |
Standard GF Series: 3 sccm - 55 slm High Flow GF Series: 55 slm - 300 slm |
| Accuracy |
Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20% High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35% |
| Repeatability | < ±0.15% S.P. |
| Pressure Transient Insensitivity | Specific models |
| Multi-Gas & Range Configurability | MultiFlo™ Standard (most models) |
| Control Range |
Standard GF Series: 2-100% High Flow GF Series: 5-100% |
| Number of Bins |
Standard GF Series: 11 bins High-Flow GF Series: 4 bins |
| Valve Shut Down |
Standard GF Series: < 0.15% F.S. High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out |
| Zero Stability | < ±0.15% F.S. per year |
| Flow Temperature Coefficient |
Span: 0.05% S.P. per °C Zero: 0.005% F.S. per °C |
| Seal Material | Metal |
| Level of Purity / Surface Finish | 5 - 10µ inch Ra |
| Wetted Materials |
SEMI F20 HP/UHP Compliant 316L VIM/VAR Hastelloy C-22 316L Stainless Steel 304 Stainless Steel KM-45 |
| Valve Options | |
| Max Temperature | 50oC |
| Max Pressure |
Standard GF Series: up to 500 psia max High Flow GF Series: 75 psig (controller), 150 psig (meter) |
| Leak Integrity | 1x10-10 atm cc/sec He |
| Alarms |
Control Valve Output Network Interruption Temperature High/Low Pressure High/Low Power Surge/Sag |
