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Đại lý Brooks Instruments tại Việt Nam_Brooks Instrument VietNam
Đại lý Brook Instruments tại Việt Nam
1. Mass Flow Controllers & Meters
- Heat treating, cutting and other thermal processes for mass flow sensors
- Semiconductor and LED production tools
- Thin film deposition systems
- Biopharmaceutical bioreactors
- Petrochemical and chemical gas and liquid pilot plants
- Purge gas, process analysis and analytical flow measurement
Product Type | Mass Flow Controller | Mass Flow Controller | Mass Flow Controller | Mass Flow Controller | Mass Flow Controller | Mass Flow Meter |
Differentiator |
Wide Flow & Pressure Range Superior Long-term Stability High Accuracy
|
High Accuracy MultiFlo™ Capability Compact Size Suitable for Full Suite of Gases |
Proven Reliable Performance Long Term Stability Easy to Change Range and Recalibrate in the Field |
NEMA 4X/IP66 Approved Enclosure Perfect for Hose Down/Wash Down Applications Hazardous Area Approvals
|
Ultra-fast Response Times Optional Local Operator Interface Compact Size Suitable for Non-corrosive Gases |
Economical Ideal Upgrade from Volumetric Devices |
Flow Range (Full Scale Capacity) | .003 - 2500 slpm | 3 sccm - 50 slpm |
0 - 1000 slpm |
.003 - 2500 slpm | 50 sccm - 40 slpm |
0 - 50 slpm |
Seal Material | Elastomer Seal | Elastomer Seal | Elastomer Seal | Elastomer Seal | Elastomer Seal |
Stainless Steel |
Max Pressure |
.003-200 slpm: 1500 psi/103 bar 100 - 2500 slpm: 1000 psi/70 bar Optional 4500 psi/310 bar on 50 slpm max device |
150 psig/10 bar |
Controllers: 1500 psig Meters: up to 4500 psig on some models |
Up to 100 lpm: 1500 psi/100 bar Up to 50 lpm: 4500psi/310 bar (optional) 100-2500 lpm: 1000 psi/70 bar |
150 psig/10 barg |
150 psig |
Accuracy |
Includes uncertainty from reference standards 0.9% of SP (20-100% FS) 0.18% of FS (2-20% FS) 1-50 slpm: 0.18% of SP (1-20% FS) 1100 slpm up to 2500 slpm: 1.0% of FS |
1% of SP 35-100%, 0.35% of FS 2-35% |
1% of FS 1.5% of FS > 20 slpm |
Up to 100 lpm: 0.90% of SP (20-100% FS) 0.18% of FS (2-20% FS, 1-20% FS from 1 - 50 lpm) 100 - 2500 lpm: 0.90% of SP (20-100% FS) 100 - 1100 lpm: 0.18% of FS (2-20% FS) 1100 - 2500 lpm: 1.0% of FS |
3.0% of FS 1.0% of FS (optional) |
5% of FS including linearity |
Repeatability |
0.20% SP |
0.20% SP |
0.25% of Rate |
0.20% SP |
0.15% FS |
0.50% FS |
Multi-Gas & Range Configurability |
Standard |
MultiFlo™ Available |
— |
Standard |
— |
— |
Diagnostic Capability | Available
|
Available |
— | Available
|
Available |
— |
Analog Communication |
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA |
0-5 V, 0-10 V |
0-5 Vdc |
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA |
0-5 Vdc |
0-5 V into 1000 ohms or greater |
Digital Communication | DeviceNet™ EtherCAT® EtherNet/IP™ FOUNDATIONTMFieldbus Profibus® RS-485 |
DeviceNetTM |
— |
DeviceNet™ FOUNDATIONTMFieldbus Profibus® RS485
|
RS232 |
— |
Size | Medium | Compact | Medium | Large |
Compact |
Compact |
2. Variable Area Flow Meters
As one of the pioneering manufacturers in variable area (VA) flow meter (rotameter) technology, Brooks Instrument has created a diverse and proven portfolio of gas flow meters, installed and in use across virtually every industry. From inline to low volume flow meters Brooks offers high-performance gas and water flow measurement instruments for your application.
3. Pressure & Vacuum
Product Type | Mechanical Pressure Regulators | Mechanical Pressure Gauges |
Mechanical Pressure Switches Mechanical Pressure Transmitters |
Differentiator |
Direct Acting, High Precision |
High-Purity |
Ultra-High Purity High Accuracy |
Pressure Range | 0-10 psi/0-0.7 bar to 0-200 psi/0-14 bar |
- 30" - 4000 psi |
Vacuum to 4,000 psi (276 bar) & metric |
Accuracy | — | 1% Full Scale | 1% Full Scale |
Housing | Standard: Aluminum Optional: 316 Stainless Steel |
300 Series Stainless Steel, electropolished | 300 Series Stainless Steel, electropolished |