Technical specifications
Measurement / control system | |
---|---|
Flow range, based on N2 (intermediate ranges available) |
min. 0,014…0,7 mln/min max. 0,18…9 mln/min |
Accuracy (incl. linearity) (based on actual calibration) |
standard: ±0,5% Rd plus ±0,1%FS (±0,8% Rd plus ±0,2% FS for ranges 3...5 mln/min; ±1% Rd plus ±1% FS for ranges < 3 mln/min) |
Repeatability | < 0,2% Rd |
Turndown | 1 : 150; in analog mode 1 : 50 |
Multi Gas / Multi Range |
embedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases. |
Operating temperature | -10…70°C |
Temperature sensitivity | zero: < 0,02% FS/°C; span: < 0,025% Rd/°C |
Pressure sensitivity | < 0,15% Rd/bar typical N2; < 0,02% Rd/bar N2 (incl. pressure correction option) |
Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
Attitude sensitivity | max. error at 90º off horizontal 0,07% FS at 1 bar, typical N2 |
Warm-up time | 30 min. for optimum accuracy |
Mechanical parts | |
---|---|
Material (wetted parts) | stainless steel 316L or comparable, degreased for use on oxygen (O2) |
Pressure rating | 100 bar (g) |
Process connections | compression type or face seal couplings |
Seals | standard: Viton® options: EPDM, Kalrez® (FFKM), FDA and USP Class VI approved compounds |
Weight | 0,5 kg |
Ingress protection (housing) | IP40 |
Electrical properties | |||
---|---|---|---|
Power supply | +15…24 Vdc | ||
Max. power consumption Meter | Supply 15 V 24 V |
at voltage I/O 69 mA 45 mA |
at current I/O 92 mA 63 mA |
Max. power consumption Controller (controllers based on normally closed valve, pin 5 not used) | Supply 15 V 24 V |
at voltage I/O 202 mA 128 mA |
at current I/O 225 mA 146 mA |
If applicable: PROFIBUS DP | add 53 mA (15 V supply) or 30 mA (24 V supply) | ||
PROFINET | add 76 mA (15 V supply) or 48 mA (24 V supply) | ||
EtherCAT® | add 66 mA (15 V supply) or 41 mA (24 V supply) | ||
DeviceNet™ | add 48 mA (24 V supply) | ||
Analog output/command | 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output) | ||
Digital communication | standard: RS232; options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS |
Electrical connection | |
---|---|
Analog/RS232 | 9-pin D-connector (male); |
PROFIBUS DP | bus: 9-pin D-connector (female); power: 9-pin D-connector (male); |
Devicenet™ | 5-pin M12-connector (male); |
EtherCAT®/PROFINET | 2 x RJ45 modular jack (in/out) |
Modbus/FLOW-BUS | RJ45 modular jack |
CE | EMC 2014/30/EU, RoHS 2011/65/EU, |
IEC 61010-1 | 2010 |